Lithography

Piezo LEGS® technology is integrated in lithography systems which are used in semiconductor manufacturing. Extremely small circuit structures can be achieved thanks to lithography technology and PiezoMotor’s motors are key components for these systems enabling to fulfill the customer’s extreme requirements on precision down to nanometer level.

Lithography systems have progressed to ever lower wavelengths to achieve higher density circuits. The complex lens systems focusing the light through the mask onto the wafer consists of of a large number of lenses in a stack. These need to be accurately aligned and Piezo LEGS® motors are well suited to achieve the high-precision adjustments that are needed.