Precise positioning on the nanometer scale require the level of exactness which Piezo LEGS® can deliver. High resolution movements with sub-nanometer microsteps, quick response and settling time, and long service life makes Piezo LEGS® the ideal choice for applications within the semiconductor segment. Our customers need dynamic closed loop positioning in production equipment operating around the clock – our direct drive piezoelectric motors have proven to live up to the tough standards of the industry.
Piezo LEGS® technology is integrated in lithography systems which are used in semiconductor manufacturing. Extremely small circuit structures can be achieved thanks to lithography technology and PiezoMotor’s motors are key components for these systems enabling to fulfill the customer’s extreme requirements on precision down to nanometer level.