Piezo LEGS® are capable of moving smoothly even at extremely slow speeds. The linear translation rate can be as low as fractions of a micrometer each second. For example, when moving at 50 nanometers per second, it takes ~280 hours to move a distance of 50 mm and therefore flows of µL per minute and below are possible.
This is achieved by the Piezo LEGS® motor ability to take very short steps. A full step, also referred to as a waveform-step (wfm-step), is typically a few micrometers and can be divided into a large number of smaller increments, so called micro steps. Sub-nanometer microsteps (less than a billionth of a meter!) are possible and can be controlled to achieve extremely slow speeds.